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New High-Resolution micro-g Accelerometer and High Density Accelerometer Arrays
Published on: 06/15/2017
WIMS2 researchers, Prof. Khalil Najafi and doctoral student Stacey Tang, have developed a new type of multi-axis, capacitive, MEMS accelerometer made from thick silicon. The new accelerometer can achieve sub-µg resolution (<1µg/vHz) and high areal sensitivity (1pF/g per 1mm2). It has a 3D, vertical, biomimetic hair-like structure, and is microfabricated from a thick silicon wafer using a new 2-gap microfabrication process that is also compatible with CMOS device integration.

The novel process circumvents some of the stringent requirements on deep reactive ion etching (DRIE) when etching thick (>500µm) layers. It enables the fabrication of large proof-mass (1mm tall, >2.33 milligram/mm2), high aspect-ratio (HAR) narrow sense gaps (<3 µm wide, >250 µm tall), and a large sense/feedback electrode area (>250 µm tall). The result is a MEMS accelerometer with an area smaller than any previous precision accelerometers with similar perf
The Future of Remote Sensing
Published on: 06/15/2017
Researchers are exploring the fundamental capabilities of remote sensing through a program that aims to create theoretical models and tools for future remote sensing of ice and snow. This research, directed by Kamal Sarabandi, Rufus S. Teesdale Professor of Engineering, could feed into the development of new sensors for a variety of remote sensing applications.
“The idea of this program is to look into the future,” said Prof. Sarabandi, “determine what new types of measurement can be done remotely, and develop the science and theory for what is and isn’t possible.” Based on the theory, researchers can determine the best ways to monitor the earth, particularly ice and snow levels which have serious ecological consequences.
Prof. Sarabandi has long been a strong proponent for pursuing this type of theoretical research. “Everything we know now was begun 10-20 years ago,” he explained. “You have to first figure out what can and can’t be done before you develop the sensors and too
CubeWorks: Solving Problems With the Worlds Smallest and Lowest-power Computers
Published on: 06/15/2017
CubeWorks, founded by the team at University of Michigan that developed the Michigan Micro Mote (M3), the worlds smallest computer, has been flying under the radar since late in 2013. This startup company specializes in the worlds smallest and lowest-power sensing technology. With its first outside funding from Intel, the CEO of CubeWorks is now looking two years into the future, when he hopes to be manufacturing millimeter-scale computing devices for their first customers.
Injectable Computers Can Broadcast From Inside the Body
Published on: 06/06/2016
Profs. David Blaauw and David Wenzloff are designing millimeter-scale ultra-low-power sensing systems that can be injected into the body through a syringe. Unlike other radios of this size, these new devices are able to broadcast through the human body to an external receiver.
Cancer Stem Cells: New Method Analyzes 10,000 Cells at Once
Published on: 09/23/2016
A new device for studying tumor cells can trap 10,000 individual cells in a single chip. The technique, developed by Prof. Euisik Yoon's group, could one day help screen potential cancer treatments based on an individual patient's tumor and help researchers better understand so-called cancer stem cells. It also shed light on a controversy: are large cells or small cells more likely to be cancer stem cells?
Novel Collaboration to Probe Brain Activity in Unprecedented Detail
Published on: 06/01/2016
A pilot program led by Prof. Euisik Yoon will regularly bring together researchers with complementary expertise from different universities to collaborate on advancing research that may lead to a better understanding of the human brain and diseases that affect it. Yoon has been leading a key development of the Michigan Probe, a revolutionary tiny solid-state microsystem developed at U-M that can be used to probe the inner workings of the brain.
Babak Parviz: Pioneer in Technological Innovations
Published on: 06/15/2017
Electrical engineer and Google Glass creator Babak Parviz is widely recognized for revolutionizing communication technology through advances in optics, self-assembly, and miniaturized electronics. Dr. Parviz, who lives in Seattle, holds a B.S. degree in electrical engineering from Sharif University of Technology in Tehran and a B.A. in literature from the University of Washington (UW). He studied micro-electro-mechanical systems at the University of Michigan, where he earned a M.S.E degree (1997) and Ph.D. (2001) in electrical engineering and a M.S. degree (2001) in physics. He completed a postdoctoral fellowship at Harvard University in chemistry and chemical biology and developed self-assembly techniques to fabricate nano-scale devices and systems as a UW faculty member. He continues to serve as an affiliate professor in UW’s Department of Electrical Engineering. In 2010, two years after developing a bionic contact lens prototype, he joined Google, where he initiated and led the Glas
2017 EECS Department Outstanding Achievement Award
Published on: 06/15/2017
Prof. Euisik Yoon Prof. Euisik Yoon "For outstanding contributions to micro electro mechanical systems (MEMS), and innovative research and leadership in biomedical microsystems and neurotechnology."
Euisik and other award winners will be recognized, along with other faculty awards and accomplishments from the past year, at the upcoming Faculty Recognition Dinner on Saturday, February 11th at 6:00 pm in the Rogel Ballroom at the Michigan Union.
2016 EECS Department Outstanding Achievement Award
Published on: 06/15/2017
Prof. Anthony Grbic received the award for inspirational teaching, dedicated mentoring of graduate students, and innovative research in metamaterials and wireless power transfer.

Prof. Mina Rais-Zadeh received the award for outstanding contributions to research in high frequency MEMS and piezoelectric semiconductor transducers, and for excellence in teaching and service.
The College of Engineering Monroe-Brown Foundation Research Excellence Award
Published on: 06/15/2017
Prof. Xudong (Sherman) Fan received this award which is bestowed upon a College of Engineering Faculty member who has demonstrated sustained excellence in research and related scholarly activities.
College of Engineering Award
Published on: 06/15/2017
Prof. Kamal Sarabandi received the Stephen S. Attwood Award, for “extraordinary achievement in teaching, research, service, and other activities that have brought distinction to the College and University.”
Michael Flynn Earns U-M Faculty Recognition Award
Published on: 10/21/2016
Prof. Michael Flynn has received a Faculty Recognition Award for his accomplishments in research, teaching, and service to the University. Prof. Flynn is one of the world's premier scholars in the area of analog and mixed-signal integrated circuits and systems, analog-to-digital conversion (ADC), and other interface circuits. His pioneering research and designs have improved the performance and energy efficiency of analog-digital interfaces and transformed the field.
ProQuest Distinguished Dissertation Award Winner
Published on: 03/02/2017
Azadeh Ansari, Electrical Engineering and Computer Science, won the ProQuest Distinguished Dissertation Award which recognizes exceptional and unusually interesting work produced by doctoral students.
David Blaauw Honored With SIA/SRC University Research Award
Published on: 09/21/2016
Prof. David Blaauw was presented with the University Research Award by the Semiconductor Industry Association (SIA), in consultation with Semiconductor Research Corporation (SRC), in recognition of his outstanding contributions to semiconductor research in the area of design research. He was presented with the award by the SIA Board on September 21, 2016 in San Jose, CA.
SPIE Fellow
Published on: 06/15/2017
Prof. Xudong (Sherman) Fan received this honor. Each year, SPIE promotes members as new Fellows of the Society. Fellows are Members of distinction who have made significant scientific and technical contributions in the multidisciplinary fields of optics, photonics, and imaging. They are honored for their technical achievement, for their service to the general optics community, and to SPIE in particular.
NSF CAREER Award
Published on: 01/11/2017
Prof. Becky Peterson received the NSF CAREER Award for research in Amorphous Semiconductors for Next Generation Electronics.
Somin Eunice Lee Receives CAREER Award
Published on: 06/15/2017
Prof. Somin Eunice Lee, assistant professor of Electrical and Computer Engineering, was awarded an NSF CAREER award for her research project, “Engineering Plasmonic Nanoantenna Architectures for Efficient Nuclear Delivery.”
Mina Rais-Zadeh Receives 2015 IEEE Sensors Council Technical Achievement Award/Research in N/MEMS
Published on: 11/05/2015
Professor Mina Rais-Zadeh has been awarded the 2015 IEEE Sensors Council Technical Achievement Award, "For pioneering research in sensors technology: adaptable nano/micro-electromechanical systems (N/MEMS)." This early career award honors individuals with outstanding technical contributions within the scope of the IEEE Sensors Council.
U-M Leading International Neurotechnology "Dream Team" for Brain Research and Education
Published on: 11/04/2015
A "dream team" of experts in sensors, electronics, data analysis and neuroscience has been awarded a $5 million grant to help unravel the mysteries of the brain and cross-train an international group of neuroscientists and engineers. The project is directed by Prof. Euisik Yoon, and includes experts and partner institutions around the world.
Silicon Valley Entrepreneurs Help Bring WIMS2 Technology to the World
Published on: 05/26/2015
As Corporate Outreach Directors for the WIMS2 Center, entrepreneurs and U-M alums Sassan Teymouri and Shahin Hedayat are helping to introduce its wireless integrated microsensing and systems technology to Silicon Valley and strengthen the Centers ties to industry.
WIMS2 Announces New Member Partner Amazon.com
Published on: 04/12/2015
The Center for Wireless Integrated MicroSensing and Systems is pleased to welcome Amazon.com as a new Member Partner.
Khalil Najafi to Receive 2015 IEEE Daniel E. Noble Award for Emerging Technologies
Published on: 09/25/2014
Professor Khalil Najafi, a co-founder of WIMS, has received the 2015 IEEE Daniel E. Noble Award for Emerging Technologies, "For leadership in micro-electro-mechanical systems (MEMS), technologies, and devices and for seminal contributions to inertial devices and hermetic wafer-level packaging."The IEEE Daniel E. Noble Award for Emerging Technologies is one of IEEE's Technical Field Awards, which are among the highest awards given by IEEE. Khalil is being recognized as a worldwide leader for nearly 30 years in the research and development of micromachined sensors, microelectromechanical systems (MEMS) and integrated microsystems. His research has translated into 2 startup companies, which he also co-founded."
WIMS2 Announces New Member Partners Hutchinson and Tyco
Published on: 08/21/2014
The Center for Wireless Integrated MicroSensing and Systems is pleased to welcome Hutchinson S.A, and Tyco International, Ltd. as new Member Partners.
WIMS2 Participates at Hilton Head
Published on: 06/08/2014
The sixteenth in the series of Hilton Head Workshops on the science and technology of solid-state sensors, actuators, and microsystems was held on June 8 - 12, 2014. WIMS2 faculty and students presented seven papers.
WIMS2 Announces New Member Partner Philips Electronics
Published on: 05/06/2014
The Center for Wireless Integrated MicroSensing and Systems is pleased to welcome Philips Electronics as a new Member Partner.
Mina Rais-Zadeh Receives 2014 ONR Young Investigator Program (YIP) Award
Published on: 04/22/2014
Prof. Mina Rais-Zadeh received a 2014 Young Investigator Award from the Office of Naval Research (ONR) for her research project, Acoustic Phonons and Their Interactions with Electrons in Gallium Nitride Ultra-fast Ultra-scaled Resonators.
Advanced Smart Sensor Networks Open Up A Multitude of Applications
Published on: 03/17/2014
Together with wireless communications, the Internet, and cloud computing and storage, a new world awaits us for smarter medical, industrial, transportation, smart building and structure, agriculture, and geophysical applications.
MEMS Research Recognized with Best Poster Award at 2013 Transducers Conference
Published on: 07/02/2013
MEMS Research Recognized with Best Poster Award at 2013 Transducers Conference
Workshop to Chart the Future of Nano and Micro Manufacturing
Published on: 05/30/2013
Workshop to Chart the Future of Nano and Micro Manufacturing
Professor Dennis Sylvester Receives U-M Faculty Recognition Award
Published on: 03/20/2013
Professor Dennis Sylvester Receives U-M Faculty Recognition Award
David Blaauw and Dennis Sylvester Named Top Authors by ISSCC
Published on: 02/18/2013
David Blaauw and Dennis Sylvester Named Top Authors by ISSCC
David Wentzloff Receives CAREER Award for Research in Energy-Autonomous Systems
Published on: 01/30/2013
David Wentzloff Receives CAREER Award for Research in Energy-Autonomous Systems
Workshop on Nano/Micro Manufacturing May 22 - 23, 2013 Ford Motor Company Conference
Published on: 05/22/2013
Workshop on Nano/Micro Manufacturing May 22 - 23, 2013 Ford Motor Company Conference and Event Center, Dearborn, Michigan
Mina Rais-Zadeh Receives NASA Early Career Grant to Develop Technology Needed for PicoSatellites
Published on: 08/15/2012
Mina Rais-Zadeh Receives NASA Early Career Grant to Develop Technology Needed for PicoSatellites
Think Outside the Chip: MEMS-Based Systems Solutions
Published on: 07/10/2012
Think Outside the Chip: MEMS-Based Systems Solutions
Crossing Over: Tackling Technology Transfers
Published on: 01/01/2012
Crossing Over: Tackling Technology Transfers
Technology Clusters and Their Role in the Commercialisation of Micro and Nano Systems
Published on: 05/02/2012
Technology Clusters and Their Role in the Commercialisation of Micro and Nano Systems
Wireless Integrated MicroSensing and Systems (WIMS2) in California
Published on: 05/01/2012
Wireless Integrated MicroSensing and Systems (WIMS2) in California
Micro and High Precision Technology Event declared a Success
Published on: 04/11/2012
Micro and High Precision Technology Event declared a Success
Benefits to Working with a University Research Lab in the Post Recession Era
Published on: 04/10/2012
Benefits to Working with a University Research Lab in the Post Recession Era: How Universities and Industry can Partner for Success
Microfabricated Passive Vapor Preconcentrator/Injector Designed for Microscale Gas Chromatography
Published on: 02/21/2012
Microfabricated Passive Vapor Preconcentrator/Injector Designed for Microscale Gas Chromatography
MEMS-Based Systems Solutions Emerge For Analytical Instruments
Published on: 01/12/2012
MEMS-Based Systems Solutions Emerge For Analytical Instruments
Professor David Blaauw Elected Fellow of the IEEE
Published on: 11/22/2011
Professor David Blaauw Elected Fellow of the IEEE
Wireless Sensor Network Research Makes Hot Tech List
Published on: 12/08/2011
Wireless Sensor Network Research Makes Hot Tech List
Blaauw-Sylvester: EE Times 20 hot technologies for 2012
Published on: 12/06/2011
Blaauw-Sylvester: EE Times 20 hot technologies for 2012
Mina Rais-Zadeh Receives 2011 EDS Early Career Award
Published on: 10/06/2011
Mina Rais-Zadeh Receives 2011 EDS Early Career Award
10/06/2011
Why MEMS-Based System Solutions?
Published on: 02/01/2011
Why MEMS-Based System Solutions?
02/01/2011
New Technologies Usher in the Millimeter-Scale Computing Era
Published on: 02/23/2011
New Technologies Usher in the Millimeter-Scale Computing Era
02/23/2011
Most Powerful Millimeter-Scale Energy Harvester Generates Electricity From Vibrations
Published on: 04/25/2011
Most Powerful Millimeter-Scale Energy Harvester Generates Electricity From Vibrations
04/25/2011
A Minimally-Invasive Brain Implant to Translate Thoughts Into Movement
Published on: 06/16/2011
A Minimally-Invasive Brain Implant to Translate Thoughts Into Movement
06/16/2011
Micro Energy Harvesters Will Make Cyborg Insects Unstoppable
Published on: 09/05/2011
Micro Energy Harvesters Will Make Cyborg Insects Unstoppable
09/05/2011
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Wireless Integrated MicroSensing & Systems (WIMS2)
University of Michigan, College of Engineering
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Email: info@wims2.org